1. Ultrapure Water – Beyond Clean

UPW is produced through multi-stage purification (RO, EDI, UV, ultrafiltration) and achieves unmatched quality:

• Resistivity ≥ 18.2 MΩ·cm (25℃): no ionic contamination

• Particles ≤ 1/mL (>0.1 μm): atomic-level cleanliness

• TOC < 1 ppb: avoiding carbon deposits

• Metal ions < 0.1 ppt: preventing mobile ion contamination

🔧 Key applications:

• Wafer cleaning at ≤0.5 nm precision

• Wet etching without copper corrosion (Cl⁻ <5 ppt)

• CMP rinsing to remove nanoscale abrasives

• Electroplating with dissolved O₂ <2 ppb to prevent voids

2. Semiconductor Chemicals – Purity Defines Yield

High-purity process chemicals must meet extreme purity and stability standards:

1️⃣ Single-component reagents (HF, H₂SO₄, NH₄OH): ≤10 ppt metal impurities (SEMI C12)

2️⃣ Formulated chemicals:

• CMP slurries: σ < 0.05 particle uniformity

• Photoresists/developers: 0.1 μm filtration to prevent laser scattering

• Electroplating solutions: organic impurities <1 ppb

• Etchants: concentration stability within ±0.1%

Any deviation can directly cause yield loss or device reliability issues.

3. BICCNS Solutions for UPW & Chemical Flow Measurement

BICCNS addresses these challenges with non-contact ultrasonic clamp-on flowmeters — FM700 and FM800 series — specifically designed for ultrapure and highly corrosive media.

✅ Zero Contamination

• Clamp-on ultrasonic TOF technology – sensors mounted outside the pipe, never touching the fluid.

• Eliminates risks of particle shedding, ion leaching, or pipeline intrusion.

✅ Corrosion-Resistant & Leak-Free

• Non-intrusive installation avoids stress corrosion cracking at welds or joints.

• Compatible with 316L, Hastelloy C276, PFA, PTFE, silicone hoses.

• Suitable for UPW, HF, H₂O₂, TMAH, and other aggressive chemicals.

✅ Accuracy & Long-Term Stability

• Coverage for 1/8"–1" pipes with wide flow range.

• Accuracy up to ±2% R.D., turndown ratio 25:1.

• Ultrasonic temperature sensing: ±0.5 °C accuracy, millisecond response.

• Self-developed and certified metrology traceability system by BICCNS, ensuring accuracy up to 0.05% R.D. with world-class stability.