PK86X-PS
PK86X-PS
PK86X-PS
Side-Output High-Purity Switch-Type Pressure Transmitter
Product Description
The PK86X-PS is a 3-in-1 high-purity pressure transmitter that combines measurement, switch control, and local indication in one compact instrument, with a side cable outlet and rotatable LED display for flexible system integration. Built with a semi-grade W-Seal connection and helium leak tested, it is cleaned and vacuum-packed in Class 100 cleanrooms to SEMI standards, delivering safe, reliable monitoring for semiconductor and specialty gas processes.
Product Description
  • Sealing
    Sealing
    Semi-grade W-seal
  • Testing
    Testing
    100% HeliumLeak Testing
  • Packaging
    Packaging
    Vacuum Packaging in Class 100Cleanroom
  • Treatment
    Treatment
    Process connection EP level:Ra ≤ 0.15 µm
Technical Specifications
Application
Gauge Pressure, Absolute Pressure, and Negative Pressure Measurement
Measurement Range
0.....100psiA
Maximum Measurement Deviation
±0.75%FS
Overload Pressure
The Rated Pressure × 3
Medium Temperature
-40....125°C
Ambient Temperature
-20....85°C
Average Temperature Coefficient(-20~85℃)
Zero:<0.1%FS/10K; Span:<0.1%FS/10K
Supply Voltage
DC24V(12...32V DC)
Output Signal
0...5V
Switch Points
2 × NPN
Display
LED Display, Dial Rotatable by 270°
Electrical Connection
Side Cable Outlet, D-SUB 15PIN (Male)
Connection Material
316L VIM/VAR
Diaphragm Material
Hastelloy C-22
Long-Term Stability
Typical 0.25%FS/Year
Leakage Rate
≤1X10-10Pa.m³/s
Packaging
Packaging: Double Vacuum Packaging, Compliant with SEMI E49.6
Document
PK86X-PS
Data Sheet
Download
PK86X-PS
Operation Manual
Download
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