PK86X
High-precision Pressure Sensor
Product Description
The PK86X high-precision pressure sensor is designed for semiconductor, LCD, LED, and other high-purity or specialty gas applications, using semi-grade C-Seal, W-Seal, or through-type seal options for dependable metal sealing. Each unit is 100% helium leak tested, cleaned, and vacuum-packed in Class 100 cleanrooms to SEMI standards, ensuring safe, ultra-clean, and stable pressure measurement.
Product Description
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SealingSemi-gradeC-Seal, W-seal.and through-typeseals -
Testing100% HeliumLeak Testing -
PackagingVacuum Packaging in Class 100Cleanroom -
TreatmentProcess connection EP level:Ra ≤ 0.15 µm
Technical Specifications
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ApplicationGauge Pressure, Absolute Pressure, and Negative Pressure Measurement
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Measurement Range-14.7....0....6000psi
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Maximum Measurement Deviation+0.5%FS(<160psi:±0.75%FS)
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Overload PressureOverload Pressure x3 Rated Pressure
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Medium Temperature-40....125°C
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Ambient Temperature-20....85°C
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Average Temperature Coefficient(-20~85℃)Temperature Coefficient:<0.1%FS/10K; Span:<0.1%FS/10K
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Supply VoltageDC24V(12...32V DC)
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Output Signal4...20mA、0...5V、0..10V、1...5V
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Process Connection9/16-18UNF（1/4"VCR）/W-seal/C-seal
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Connection MaterialSUS316L VIM/VAR
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Diaphragm Material316L VIM/VAR/Nickel-based Alloy / Hastelloy
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StabilityTypical: 0.25%FS/Year
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Repeatability≤ 0.1%
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Zero Point AdjustmentZero Point Adjustment: -10...+10%
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Internal Surface RoughnessRa:<0.15µm
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Leakage Rate≤1X10-10Pa.m³/s
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PackagingPackaging: Double Vacuum Packaging, Compliant with SEMI E49.6
Configuration
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