1. About Specialty Gases
Specialty gases refer to gases with unique properties that are used for specific applications in certain industries. These gases often require extremely high purity, stability, and precise composition ratios, or may themselves be flammable, explosive, toxic, or corrosive. As a result, strict standards must be followed in their production, storage, transportation, and use.
2. Main Categories of Specialty Gases
Electronic Specialty Gases: Core materials for the semiconductor, chip, and photovoltaic industries. They are used in critical processes such as etching, doping, and deposition. Examples include silane (SiH₄), ammonia (NH₃), and hydrogen fluoride (HF). These gases demand ultra-high purity, often at levels above 99.999%.
High-Purity Gases: Gases with purity far exceeding that of conventional industrial gases, such as high-purity nitrogen and high-purity oxygen. They are widely used in precision instrument calibration, laboratory research, and other fields.
3. BICCNS Solutions
1. Zero Contamination Risk BICCNS adopts a dry metal diaphragm design, unlike conventional oil-filled pressure sensor structures. The oil-free architecture eliminates contamination risks at the source, ensuring gas integrity in semiconductor processes.
2. Ultra-Low Leakage and High Reliability With an integrated one-piece design, BICCNS sensors feature only one weld seam (compared to two in traditional designs). This greatly reduces leakage risks. Moreover, by positioning the weld away from the sensing diaphragm, thermal and mechanical stresses are prevented from impacting the sensitive core components, ensuring long-term stability. Precision manufacturing processes further improve product consistency, achieving an ultra-low leakage rate of ≤1×10⁻¹⁰ Pa·m³/s. Unlike conventional ceramic or MEMS-based solutions, BICCNS sensors combine excellent corrosion resistance with superior hermetic sealing, delivering stable and reliable performance even under harsh operating conditions.
3. Long-Term Stability BICCNS operates more than 2,000 m² of cleanroom facilities, with strict particle control in Class 100 and Class 1,000 areas. From R&D to production, the entire process is governed by SEMI standards, with surface roughness controlled to Ra ≤ 0.15 µm. Designed specifically for semiconductor environments, our sensors overcome the common shortcomings of traditional solutions—such as corrosion leakage, vibration drift, and excessive temperature drift. Even when exposed to corrosive chemicals, high-vibration impacts, or extreme temperature cycling, BICCNS sensors maintain stable performance and ensure long-term reliable operation.