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PK66X
High Purity Pressure Sensor
Product Description

This product features an all-metal welded structure, with an option for semiconductor photovoltaic-specific pressure joints. The media contacting surface undergoes 100% special EP treatment and is degreased and oil-free cleaned, ensuring suitability for semiconductor, photovoltaic, flat panel display, high purity/ultra-pure environments, special gas pipeline applications, and more.

The pressure range spans from -14.7 to 6000 psi, with customizable ranges available to meet specific customer requirements.

With 100% leakage testing during production, the product meets industry sealing standards, mitigating risks of flammable, corrosive, or toxic media overflow.

Manufactured entirely in a Class 100 cleanroom environment and vacuum-packaged, the product undergoes 100% cleaning, adhering to SEMI standards.

Product Features
  • Sealing:9/16-18UNF、 C/W-Seal、 Through-flow
  • Test:100% helium leakage test
  • Packaging:Vacuum packaging in a Class 100 cleanroom
  • Surface treatment:The process connection has an EP grade finish with Ra ≤ 0.18µm.
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