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PK86X
High Purity Switch Pressure Transmitter
Product Description

This product features an integrated all-metal welded structure and offers the option of semiconductor-specific pressure joints. The liquid-contacting surface undergoes 100% special EP treatment and is degreased and oil-free cleaned, ensuring suitability for semiconductor, flat panel display, high purity/ultra-pure environments, and special gas pipeline applications.

The pressure range spans from -14.7 to 5000 psi, with customizable ranges available to meet specific

customer requirements.

The product undergoes 100% leakage testing during production to meet industry sealing standards, mitigating risks of flammable, corrosive, or toxic media overflow.

Manufactured entirely in a Class 100 cleanroom environment and vacuum-packaged, the product undergoes 100% cleaning, adhering to SEMI standards.

Product Features
  • Sealing:Semiconductor-specific C-Seal, W-Seal, Through-flow design, etc.
  • Test:100% helium leakage test
  • Packaging:Vacuum packaging in a Class 100 cleanroom
  • Surface treatment:The process connection surface has an EP grade finish with Ra ≤ 0.18µm.
Data Sheets Operating Instructions
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